- Compact Low-Profile Design
- 150mm XY Travel
- Zero backlash, precision ground ball screws
- Optical limit switches with home
- Stepper Motor
- Crossed Roller Bearings
The CXY-BS series stages are designed for a variety of applications. This compact low profile ball screw stage is built for high duty cycles and long life and can attain high velocities for factory automation and semiconductor processing equipment. The CXY series offers extraordinary levels of orthogonality and parallelism resulting in high accuracy for combined axis motion. Crossed roller ways and precision ground ball screws offer extremely smooth operation and velocity control. The XY stage can operate in any orientation and has optional brakes for added safety.
| Product Family | CXY |
| Encoder Type | Limit and Home Switch Only |
| Precision | Standard Precision |
| Additional Options | No Additional Options |
| Travel (mm) | 150 |
| Frame Style | No Aperture |
| Drive Type | Ball Screw |
| Motor | Stepper |
| Precision Class | Standard Precision |
| Accuracy (μm) | 25 |
| Force X (N) | 150 |
| Force Y (N) | 150 |
| Force Z (N) | 250 |
| Flatness (μm) | 7 |
| Height (mm) | 66 |
| Length (mm) | 367 |
| Limit Switches | Yes |
| Repeatability (μm) | 3 |
| Linear Velocity (mm/s) | 25 |
| Moment X (N·m) | 110 |
| Moment Y (N·m) | 110 |
| Moment Z (N·m) | 75 |
| Moving Mass X (kg) | 9.08 |
| Moving Mass Y (kg) | 3.59 |
| Encoder Type | Limit and Home Switch Only |
| Orthogonality (arc-sec) | 10 |
| Pitch (arc-sec) | 15 |
| Stage Mass (kg) | 13.57 |
| Stepper Motor Resolution | 400 |
| Straightness (μm) | 7 |
| Width (mm) | 312 |
| Yaw (arc-sec) | 7 |
