XY Stages

CXY-C-200

200mm Precision XY Motion Stage
Product SKU:
CXY-C-200
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Overview

This 200 mm XY planar stage features high-stiffness crossed roller bearings for smooth, precise motion. Each axis is side-driven by a precision-ground ballscrew coupled directly to the brushless motor. This provides a low-profile along with excellent accuracy, repeatability, stiffness and bandwidth. Multiple encoder options are available—including rotary, linear, and absolute linear—to suit a wide range of accuracy, resolution, and interface requirements. Stepper motor variants are also available for more cost-sensitive applications.

Features

200mm XY Travel
Available Precision-Ground Ballscrew Drives
Optical Limit Switches and Home Markers
Variety of Encoder Options
Low Profile Design
Crossed Roller Bearings
Available Integrated frameless servo motors

Specifications

Accuracy (µm):Up to 2.0 (with Calibration)
Drive Type:Ballscrew or Leadscrew
Flatness (µm):11
Force Z:400
Moving Mass X:11.5
Moving Mass Y:5
Pitch (arc-sec):20
Stage Mass (kg):18
Family:CXY
Straightness (µm):11
Yaw:20
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Mechanical Details

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