This 150 mm XY planar stage features high-stiffness crossed roller bearings for smooth, precise motion. Each axis is side-driven by a precision-ground ballscrew coupled directly to the brushless motor. This provides a low-profile along with excellent accuracy, repeatability, stiffness and bandwidth. Multiple encoder options are available—including rotary, linear, and absolute linear—to suit a wide range of accuracy, resolution, and interface requirements. Stepper motor variants are also available for more cost-sensitive applications.
Accuracy (µm): | Up to 2.0 (with Calibration) |
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Drive Type: | Ballscrew or Leadscrew |
Encoder Resolution (µm): | Up to 0.1 |
Encoder Type: | Incremental Rotary or Linear, Absolute Linear |
Flatness (µm): | 7 |
Force Z: | 400 |
Moment X: | 80 |
Moment Y: | 80 |
Moment Z: | 50 |
Moving Mass X: | 9 |
Moving Mass Y: | 3.75 |
Pitch (arc-sec): | 16 |
Stage Mass (kg): | 13.75 |
Family: | CXY |
Straightness (µm): | 7 |
Travel (mm): | 150 |
Yaw: | 16 |