XY Stages

CXY-C-150

150mm Precision XY Motion Stage
Product SKU:
CXY-C-150
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Overview

This 150 mm XY planar stage features high-stiffness crossed roller bearings for smooth, precise motion. Each axis is side-driven by a precision-ground ballscrew coupled directly to the brushless motor. This provides a low-profile along with excellent accuracy, repeatability, stiffness and bandwidth. Multiple encoder options are available—including rotary, linear, and absolute linear—to suit a wide range of accuracy, resolution, and interface requirements. Stepper motor variants are also available for more cost-sensitive applications.

Features

150mm XY Travel
Available Precision-Ground Ballscrew Drives
Optical Limit Switches and Home Markers
Variety of Encoder Options
Low Profile Design
Crossed Roller Bearings
Available Integrated frameless servo motors

Specifications

Accuracy (µm):Up to 2.0 (with Calibration)
Drive Type:Ballscrew or Leadscrew
Encoder Resolution (µm):Up to 0.1
Encoder Type:Incremental Rotary or Linear, Absolute Linear
Flatness (µm):7
Force Z:400
Moment X:80
Moment Y:80
Moment Z:50
Moving Mass X:9
Moving Mass Y:3.75
Pitch (arc-sec):16
Stage Mass (kg):13.75
Family:CXY
Straightness (µm):7
Travel (mm):150
Yaw:16
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Mechanical Details

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