This 50 mm XY planar stage features high-stiffness crossed roller bearings for smooth, precise motion. Each axis is side-driven by a precision-ground ballscrew coupled directly to the brushless motor. This provides a low-profile along with excellent accuracy, repeatability, stiffness and bandwidth. Multiple encoder options are available—including rotary, linear, and absolute linear—to suit a wide range of accuracy, resolution, and interface requirements. Stepper motor variants are also available for more cost-sensitive applications.
| Accuracy (µm): | Up to 2.0 (with Calibration) |
|---|---|
| Drive Type: | Ballscrew or Leadscrew |
| Encoder Resolution (µm): | Up to 0.1 |
| Encoder Type: | Incremental Rotary or Linear, Absolute Linear |
| Flatness (µm): | 5 |
| Force Z: | 400 |
| Moment X: | 80 |
| Moment Y: | 80 |
| Moment Z: | 50 |
| Moving Mass X: | 4.25 |
| Moving Mass Y: | 1.25 |
| Pitch (arc-sec): | 8 |
| Stage Mass (kg): | 6.25 |
| Family: | CXY |
| Yaw: | 8 |