Semiconductor Processing
GXY-C-240
240mm Precision XY Stage
- Product SKU:
- GXY-C-240
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Overview
The GXY-240 is a precision XY motion stage designed for demanding semiconductor processing and inspection applications. With 240 mm of travel in both axes, it is ideally sized for tools built for 200 mm wafers while providing ample travel for alignment, metrology, and wafer handling tasks. The stage features exceptional flatness and high structural rigidity, enabling stable motion and repeatable positioning even under demanding process conditions. While optimized for semiconductor wafer processing, the GXY’s combination of precision, stiffness, and travel range also makes it well suited for other precision automation, inspection, and advanced manufacturing applications.
Features
240mm XY Travel
Crossed Roller Bearings for Smooth Motion
Multiple Optical Encoder Options
High-Rigidity Structure
Internal Cable Management
Brushless DC Servo Motors
Specifications
| Accuracy (±µm): | Down to 11.0 (Encoder Dependent) |
|---|---|
| Calibrated Accuracy (±µm): | Down to 1.0 |
| Bi-Directional Repeatability (µm): | Down to 0.5 |
| Flatness/Straightness (µm): | 7.5 |
| Pitch/Yaw (±arc-sec): | 7.5 |
| XY Orthogonality (arc-sec): | 10.0 |
| Maximum Payload (kg): | 80 |
| Stage Mass (kg): | 41 |
Mechanical Details
Downloads
