XY Stages

CXY-O-150-BS-A-H-S-0-00

Precision XY Motion Platform

Product SKU:: CXY-O-150-BS-A-H-S-0-00

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Overview

The CXY-BS series stages are designed for a variety of applications. This compact low profile ball screw stage is built for high duty cycles and long life and can attain high velocities for factory automation and semiconductor processing equipment. The CXY series offers extraordinary levels of orthogonality and parallelism resulting in high accuracy for combined axis motion. The open aperture allows for part access from both the top and bottom of the stage. Recirculating ball linear ways and precision ground ball screws offer extremely smooth operation and velocity control. The XY stage can operate in any orientation and has optional brakes for added safety.

Features

Compact Low-Profile Design

150mm XY Travel

Zero backlash, precision ground ball screws

Optical limit switches with home

High resolution rotary encoder

Brushless servo motor drive

Recirculating ball linear ways

Open Aperture

Specifications

Accuracy (µm):	20
Additional Options:	No Additional Options
Drive Type:	Ball Screw
Encoder Output:	A quad B, index
Encoder Resolution (µm):	0.125
Encoder Type:	0.125um Rotary
Flatness (µm):	7
Force X:	200
Force Y:	200
Force Z:	250
Height (mm):	66
Length (mm):	309
Limit Switches:	Yes
Linear Velocity (mm/s):	150
Moment X:	110
Moment Y:	110
Moment Z:	75
Moving Mass X:	7.01
Moving Mass Y:	2.49
Pitch (arc-sec):	15
Stage Mass (kg):	9.98
Precision Class:	Standard Precision
Family:	CXY
Repeatability (µm):	2
Travel (mm):	150
Width:	366
Yaw:	10