XY Stages

LXY-150-LM-G-M-S-0-00

Precision XY Motion Platform

Product SKU:: LXY-150-LM-G-M-S-0-00

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Overview

The LXY series stages are designed for a variety of applications. This compact low profile
two-axis stage is built for high duty cycles and long life and attains high velocities for factory
automation and semiconductor processing equipment. The linear motors offer extremely smooth
operation and velocity control. The LXY series offers extraordinary levels of orthogonality and
parallelism resulting in high accuracy for combined axis motion.

Features

Compact Low-Profile Design

150mm XY Travel

High speed linear motors

High resolution linear encoder

Crossed roller bearings

Extended life trackless cable

Specifications

Accuracy (µm):	10
Drive Type:	Linear Motor
Encoder Resolution (µm):	0.1
Encoder Type:	0.1µm Linear SS Scale
Force X Peak:	170
Force X Continuous:	50
Force Z:	400
Height (mm):	83
Length (mm):	407
Limit Switches:	Yes
Moment X:	50
Moment Y:	50
Moment Z:	25
Moving Mass X:	9.3
Moving Mass Y:	4.8
Pitch (arc-sec):	15
Stage Mass (kg):	15
Travel (mm):	150
Width:	332
Yaw:	7