Semiconductor Processing

XYS-500-400

High-Precision XY Stage for Semiconductor Applications

Product SKU:: XYS-500-400

Do you have questions? Contact our Experts: (866) 906-2709

Overview

The Griffin Motion XYS is a high-performance XY planar motion stage engineered specifically for the semiconductor industry. It features ironless linear motors that deliver high acceleration, high speeds, and exceptional, cog free positioning performance. The wide rail spacing on the lower (X) axis enhances rigidity and ensures excellent flatness. Designed for long production life, the XYS offers excellent field serviceability, allowing for quick maintenance and minimal downtime. Contact Griffin Motion for pricing, availability and customizations.

Features

500mm x 400mm XY Travel

Built for Cleanroom Compatibility

Excellent Field Serviceability and Long Service Life

Ironless Linear Motors

High-Resolution Encoders

Optional Cable Management for 3rd Axis of Motion and Customer Accessories

Optional Vacuum/Air Lines

Specifications

Accuracy (µm):	10.0 (2.0 Compensated)
Drive Type:	Direct Drive
Encoder Output:	Incremental, A quad B or 1Vpp, Index
Flatness (µm):	8/300mm
Force X:	296 (Cont.), 1018 (Peak)
Force Y:	198 (Cont.), 679 (Peak)
Limit Switches:	Yes
Moving Mass X:	37
Moving Mass Y:	6
Stage Mass (kg):	87