XY Stages
OXY-300
300mm Open-Aperture XY Motion Stage Designed Specifically for Automated Microscopy
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Overview
The OXY-300 is an open-frame, high-precision planar motion stage offering 300 mm of XY travel for microscopy and inspection applications requiring extended scan range. Each axis is side-driven by a precision-ground ballscrew coupled directly to the brushless motor, providing a low profile along with excellent accuracy, repeatability, stiffness and bandwidth. Multiple encoder options are available—including rotary, linear, and dual (rotary and linear)—to suit a wide range of accuracy, resolution, and interface requirements. Stepper motor variants are also available for more cost-sensitive applications
Features
300mm XY Travel
Clear Aperture for Backlighting and 2-Sided Inspection
Zero-Backlash Precision-Ground Ballscrew Drives
Optical Limit Switches and Home Markers
Variety of Encoder Options
Low Profile Design
Recirculating Linear Guides
Integrated frameless servo motors
Specifications
| Accuracy (±µm): | Down to 2.0µm |
|---|---|
| Bi-Directional Repeatability (µm): | Down to 0.5 |
| Straightness/Flatness (±µm): | 12.0 |
| Pitch/Yaw (±µm): | 20.0 |
| XY Orthogonality (arc-sec): | 10.0 |
| Load Capacity (kg): | 40 |
| Stage Mass (kg): | 35 |
Mechanical Details
Downloads
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