The OXY is an open-frame, high-precision planar motion stage designed primarily for microscopy applications. Each axis is side-driven by a precision-ground ballscrew coupled directly to the brushless motor. This provides a low-profile along with excellent accuracy, repeatability, stiffness and bandwidth. Multiple encoder options are available—including rotary, linear, and dual (rotary and linear)—to suit a wide range of accuracy, resolution, and interface requirements. Stepper motor variants are also available for more cost-sensitive applications.
| Accuracy (±µm): | Down to 2.0µm |
|---|---|
| Bi-Directional Repeatability (µm): | Down to 0.5 |
| Straightness/Flatness (±µm): | 12.0 |
| Pitch/Yaw (±µm): | 20.0 |
| XY Orthogonality (arc-sec): | 10.0 |
| Load Capacity (kg): | 20 |
| Stage Mass (kg): | 10.0 |