Elevator Stages
WRC-012
Precision Vertical Lift (12.5mm) and Rotation (360°) Stage
- Product SKU:
- WRC-012
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Overview
The WRC-012 is a high-precision vertical-lift and rotation stage engineered specifically for wafer-chuck manipulation in semiconductor processing. Combining a wedge-based lift mechanism with a smooth, direct-drive rotary axis, the WRC-012 provides accurate, repeatable positioning for demanding semiconductor applications. Its compact, stable design maintains precision under load, while the integrated lift-and-rotate architecture simplifies system design and reduces stack-up errors. Ideal for inspection, metrology, and general wafer handling, the WRC-012 delivers reliable, high-performance motion in cleanroom environments.
Features
• 12.5mm of Vertical Travel
• Continuous Rotational Travel
• Optional Pneumatic Rotary Union for Wafer-Chucking
• Variety of Encoder Options
• Crossed Roller Linear Bearings
• Direct-Drive Rotary Motor
• Optional Cleanroom Compatibility
Specifications
| Vertical Position Accuracy (µm): | 5.0 |
|---|---|
| Vertical Position Repeatability (µm): | 1.0 |
| Maximum Liftiing Velocity (mm/s): | 10 |
| Rotational Position Accuracy (±arc-sec): | 30.0 |
| Rotational Position Repeatability (arc-sec): | 3.0 |
| Lifting Force (N): | 400 |
| Continuous Torque (Nm): | 1.56 |
| Payload Capacity (kg): | 20 |
Mechanical Details
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