- Compact Low-Profile Design
- 160mm Travel
- Linear Motor
- Optical limit switches with home
- High resolution linear encoder
- Crossed Roller Bearings
The NPS Series stages are designed for a variety of applications. This compact low profile
linear motor stage is built for high duty cycles and long life and attains high velocities for factory
automation and semiconductor processing equipment. This stage has exceptional levels of
accuracy, repeatability, flatness and straightness. The linear motor and crossed roller bearings
provide smooth motion. The NPS Series stages can be stacked to create XY motion.
| Product Family | NPS |
| Precision | Standard Precision |
| Travel (mm) | 160 |
| Drive Type | Linear Motor |
| Accuracy (μm) | 4 |
| Force X (N) | 19.5 |
| Force Y (N) | 100 |
| Force Z (N) | 100 |
| Flatness (μm) | 6 |
| Height (mm) | 45 |
| Length (mm) | 298 |
| Limit Switches | Yes |
| Repeatability (μm) | 0.2 |
| Linear Velocity (mm/s) | 300 |
| Moment X (N·m) | 2.0 |
| Moment Y (N·m) | 2.0 |
| Moment Z (N·m) | 2.0 |
| Moving Mass X (kg) | 1.80 |
| Encoder Type | 20µm Linear SS, Sinusoidal |
| Pitch (arc-sec) | 12 |
| Stage Mass (kg) | 4.14 |
| Straightness (μm) | 6 |
| Width (mm) | 130 |
| Yaw (arc-sec) | 12 |
