- 100-800mm Travels Available
- Linear Motor
- Optical limit switches with home
- High resolution linear encoder, RS422 or 1Vpp
- Recirculating ball linear ways
- Side seals
- Extended life trackless cable
The LM3 Series stages are designed for a variety of applications. This compact low profile linear motor stage is built for high duty cycles and long life and attains high velocities for factory automation and semiconductor processing equipment. This stage has exceptional levels of accuracy, repeatability, flatness and straightness. Recirculating ball linear ways and the linear motor offer extremely smooth operation and velocity control. The trackless cable minimizes vibrations and increases service life. Side seals and a hard cover make it an excellent choice for dirty environments. The LM3 Series stages can be stacked to create XY motion.
| Product Family | LM3 |
| Encoder Type | Linear Encoder, 40µm Line Pitch, Stainless Steel Scale |
| Additional Options | Side Seals |
| Travel (mm) | 100-800 |
| Drive Type | Direct Drive |
| Motor | Ironless Linear Servo |
| Accuracy (μm) | ±2.0 (Calibrated) |
| Encoder Output | RS422 or 1Vpp |
| Force X Peak (N) | 141 |
| Force X Continuous (N) | 41 |
| Force Y (N) | 200 |
| Force Z (N) | 440 |
| Repeatability (μm) | 1.0 |
| Moving Mass X (kg) | 2.02 |
