- High speed
- 200mm Travel
- Precision ground ball screw drive
- Optical limit switches with home
- High resolution linear encoder
- Recirculating ball linear ways
- Side seals
The LM3 Series stages are designed for a variety of applications. This compact low profile linear stage is built for high duty cycles and long life and attains high velocities for factory automation and semiconductor processing equipment. This stage has exceptional levels of accuracy, repeatability, flatness and straightness. The recirculating ball linear ways and the precision ground ball screw offer extremely smooth operation and velocity control. Side seals and a hard cover make it excellent choice for dirty environments. The LM3 Series stages can be stacked to create XY motion.
| Product Family | LM3 |
| Encoder Type | 0.1µm Linear SS Scale |
| Additional Options | Side Seals |
| Travel (mm) | 200 |
| Drive Type | Ball Screw |
| Motor | Brushless Servo |
| Precision Class | Standard Precision |
| Accuracy (μm) | 10 |
| Encoder Output | A quad B, index |
| Force X (N) | 200 |
| Force Y (N) | 200 |
| Force Z (N) | 440 |
| Flatness (μm) | 4 |
| Height (mm) | 62 |
| Length (mm) | 491 |
| Limit Switches | No |
| Encoder Resolution (μm) | .1 |
| Repeatability (μm) | 1 |
| Linear Velocity (mm/s) | 150 |
| Moment X (N·m) | 50 |
| Moment Y (N·m) | 50 |
| Moment Z (N·m) | 25 |
| Moving Mass X (kg) | 1.87 |
| Pitch (arc-sec) | 8 |
| Stage Mass (kg) | 7.19 |
| Straightness (μm) | 4 |
| Width (mm) | 200 |
| Yaw (arc-sec) | 8 |
