- 320mm XY Travel
- Vacuum Rated 10-7 Torr
- Zero backlash, precision ground ball screws
- High resolution linear encoders
- Brushless servo motor drive
- Crossed Roller Bearings
The VXY series stages are designed for high precision, in-vacuum positioning applications. This ball screw driven stage is built for high duty cycles and long life and can attain high velocities for factory automation and semiconductor processing equipment. The VXY series offers extraordinary levels of orthogonality and parallelism resulting in high accuracy for combined axis motion. Crossed roller bearings and precision ground ball screws offer extremely smooth operation and velocity control.
| Product Family | VXY |
| Encoder Type | Linear, Glass Scale |
| Precision | High Precision |
| Additional Options | Vaccuum Preparation |
| Travel (mm) | 320 |
| Frame Style | No Aperture |
| Drive Type | Ball Screw |
| Motor | High Torque Brushless Servo |
| Precision Class | High Precision |
| Accuracy (μm) | 10 |
| Encoder Output | 1Vp-p |
| Force X (N) | 200 |
| Force Y (N) | 200 |
| Force Z (N) | 200 |
| Height (mm) | 111 |
| Length (mm) | 538 |
| Limit Switches | No |
| Encoder Resolution (μm) | 4 um signal period |
| Repeatability (μm) | 0.5 |
| Linear Velocity (mm/s) | 50 |
| Moment X (N·m) | 50 |
| Moment Y (N·m) | 50 |
| Moment Z (N·m) | 25 |
| Moving Mass X (kg) | 46 |
| Moving Mass Y (kg) | 13 |
| Encoder Type | Linear, Glass Scale |
| Orthogonality (arc-sec) | 10 |
| Pitch (arc-sec) | 5 |
| Stage Mass (kg) | 74 |
| Straightness (μm) | 5 |
| Width (mm) | 614 |
| Yaw (arc-sec) | 5 |
