XY Stages

The CXY-BS series stages from Griffin Motion are designed for a variety of applications. This compact, low-profile ball screw stage is built for heavy-duty cycles and long life and can attain the high velocities needed for factory automation and semiconductor processing equipment. The CXY series offers extraordinary levels of orthogonality and parallelism, resulting in high accuracy for combined axis motion. Recirculating ball linear ways and precision-ground ball screws offer extremely smooth operation and velocity control. The XY stage can operate in any orientation and has optional brakes for added safety, as the application requires.

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CXY-C-050-BS-A-H-S-0-00 Precision XY Motion Platform


  • Motor: Brushless Servo
  • Accuracy (μm): 10
  • Repeatability (μm): 2
  • Drive Type: Ball Screw
  • Travel (mm): 50

CXY-C-050-BS-A-M-P-0-00 Precision XY Motion Platform


  • Motor: Brushless Servo
  • Accuracy (μm): 4
  • Repeatability (μm): 0.5
  • Drive Type: Ball Screw
  • Travel (mm): 50

CXY-C-100-BS-A-H-S-0-00 Precision XY Motion Platform


  • Motor: Brushless Servo
  • Accuracy (μm): 15
  • Repeatability (μm): 2
  • Drive Type: Ball Screw
  • Travel (mm): 100

CXY-C-100-BS-A-H-S-D-00 Precision XY Motion Platform


  • Motor: Brushless Servo
  • Accuracy (μm): 15
  • Repeatability (μm): 2
  • Drive Type: Ball Screw
  • Travel (mm): 100

CXY-C-100-BS-A-M-P-0-00 Precision XY Motion Platform


  • Motor: Brushless Servo
  • Accuracy (μm): 04
  • Repeatability (μm): 0.5
  • Drive Type: Ball Screw
  • Travel (mm): 100

CXY-C-100-BS-A-M-S-0-00 Precision XY Motion Platform


  • Motor: Brushless Servo
  • Accuracy (μm): 10
  • Repeatability (μm): 1
  • Drive Type: Ball Screw
  • Travel (mm): 100

CXY-C-100-BS-B-N-S-0-00 Precision XY Motion Platform


  • Motor: Stepper
  • Accuracy (μm): 20
  • Repeatability (μm): 3
  • Drive Type: Ball Screw
  • Travel (mm): 100

CXY-C-100-HS-C-N-S-0-00 Precision XY Motion Platform


  • Motor: Hybrid Stepper lead screw
  • Accuracy (μm): 30
  • Repeatability (μm): 5
  • Drive Type: Hybrid Stepper Leadscrew
  • Travel (mm): 100

CXY-C-150-BS-A-H-S-0-00 Precision XY Motion Platform


  • Motor: Brushless Servo
  • Accuracy (μm): 20
  • Repeatability (μm): 2
  • Drive Type: Ball Screw
  • Travel (mm): 150

CXY-C-150-BS-A-M-P-0-00 Precision XY Motion Platform


  • Motor: Brushless Servo
  • Accuracy (μm): 6
  • Repeatability (μm): 0.5
  • Drive Type: Ball Screw
  • Travel (mm): 150

CXY-C-150-BS-A-M-S-0-00 Precision XY Motion Platform


  • Motor: Brushless Servo
  • Accuracy (μm): 10
  • Repeatability (μm): 1
  • Drive Type: Ball Screw
  • Travel (mm): 150

CXY-C-150-BS-B-N-S-0-00 Precision XY Motion Platform


  • Motor: Stepper
  • Accuracy (μm): 25
  • Repeatability (μm): 3
  • Drive Type: Ball Screw
  • Travel (mm): 150

CXY-C-150-HS-C-N-S-0-00 Precision XY Motion Platform


  • Motor: Hybrid Stepper lead screw
  • Accuracy (μm): 40
  • Repeatability (μm): 5
  • Drive Type: Hybrid Stepper Leadscrew
  • Travel (mm): 150

CXY-C-200-BS-A-H-S-0-00 Precision XY Motion Platform


  • Motor: Brushless Servo
  • Accuracy (μm): 25
  • Repeatability (μm): 2
  • Drive Type: Ball Screw
  • Travel (mm): 200

CXY-C-200-BS-A-M-P-0-00 Precision XY Motion Platform


  • Motor: Brushless Servo
  • Accuracy (μm): 8
  • Repeatability (μm): 0.5
  • Drive Type: Ball Screw
  • Travel (mm): 200

CXY-C-200-BS-A-M-S-0-00 Precision XY Motion Platform


  • Motor: Brushless Servo
  • Accuracy (μm): 12
  • Repeatability (μm): 1
  • Drive Type: Ball Screw
  • Travel (mm): 200

CXY-C-200-BS-B-N-S-0-00 Precision XY Motion Platform


  • Motor: Stepper
  • Accuracy (μm): 30
  • Repeatability (μm): 3
  • Drive Type: Ball Screw
  • Travel (mm): 200

CXY-C-200-HS-C-N-S-0-00 Precision XY Motion Platform


  • Motor: Hybrid Stepper lead screw
  • Accuracy (μm): 45
  • Repeatability (μm): 5
  • Drive Type: Hybrid Stepper Leadscrew
  • Travel (mm): 200

CXY-C-300-BS-A-H-S-0-00 Precision XY Motion Platform


  • Motor: Brushless Servo
  • Accuracy (μm): 30
  • Repeatability (μm): 2
  • Drive Type: Ball Screw
  • Travel (mm): 300

CXY-C-300-BS-A-M-P-0-00 Precision XY Motion Platform


  • Motor: Brushless Servo
  • Accuracy (μm): 12
  • Repeatability (μm): 1.0
  • Drive Type: Ball Screw
  • Travel (mm): 300

CXY-C-300-BS-A-M-S-0-00 Precision XY Motion Platform


  • Motor: Brushless Servo
  • Accuracy (μm): 20
  • Repeatability (μm): 1
  • Drive Type: Ball Screw
  • Travel (mm): 300

CXY-C-300-BS-B-M-S-0-00 Precision XY Motion Platform


  • Motor: Stepper Motor
  • Accuracy (μm): 20
  • Repeatability (μm): 1.0
  • Drive Type: Ball Screw
  • Travel (mm): 300

CXY-C-300-BS-B-N-S-0-00 Precision XY Motion Platform


  • Motor: Stepper
  • Accuracy (μm): 30
  • Repeatability (μm): 3
  • Drive Type: Ball Screw
  • Travel (mm): 300

CXY-O-150-BS-A-H-S-0-00 Precision XY Motion Platform


  • Motor: Brushless Servo
  • Accuracy (μm): 20
  • Repeatability (μm): 2
  • Drive Type: Ball Screw
  • Travel (mm): 150

CXY-O-150-BS-B-N-S-0-00 Precision XY Motion Platform


  • Motor: Stepper
  • Accuracy (μm): 25
  • Repeatability (μm): 3
  • Drive Type: Ball Screw
  • Travel (mm): 150

CXY-O-150-HS-C-N-S-0-00 Precision XY Motion Platform


  • Motor: Hybrid Stepper lead screw
  • Accuracy (μm): 40
  • Repeatability (μm): 5
  • Drive Type: Hybrid Stepper Leadscrew
  • Travel (mm): 150

CXY-O-300-BS-A-H-S-0-00 Precision XY Motion Platform


  • Motor: Brushless Servo
  • Accuracy (μm): 30
  • Repeatability (μm): 2
  • Drive Type: Ball Screw
  • Travel (mm): 300

CXY-O-300-BS-A-M-P-0-00 Precision XY Motion Platform


  • Motor: Brushless Servo
  • Accuracy (μm): 12
  • Repeatability (μm): 1.0
  • Drive Type: Ball Screw
  • Travel (mm): 300

CXY-O-300-BS-A-M-S-0-00 Precision XY Motion Platform


  • Motor: Brushless Servo
  • Accuracy (μm): 20
  • Repeatability (μm): 1
  • Drive Type: Ball Screw
  • Travel (mm): 300

CXY-O-300-BS-B-N-S-0-00 Precision XY Motion Platform


  • Motor: Stepper
  • Accuracy (μm): 35
  • Repeatability (μm): 5
  • Drive Type: Ball Screw
  • Travel (mm): 300

EXY-140-060-HS-C-V-S-0-00 XY Motion Platform


  • Motor: Hybrid Stepper lead screw
  • Accuracy (μm): 75
  • Repeatability (μm): 10
  • Drive Type: Hybrid Stepper Leadscrew
  • Travel (mm): 140-060

GXY-C-320-BF-D-H-S-0-00 Precision XY Motion Platform


  • Motor: High Torque Brushless Servo
  • Accuracy (μm): 30
  • Repeatability (μm): 2
  • Drive Type: Ball Screw
  • Travel (mm): 320

GXY-C-320-BF-D-M-S-0-00 Precision XY Motion Platform


  • Motor: High Torque Brushless Servo
  • Accuracy (μm): 15
  • Repeatability (μm): 1
  • Drive Type: Ball Screw
  • Travel (mm): 320

LXY-150-LM-G-M-S-0-00 Precision XY Motion Platform


  • Motor: Ironless Linear Servo
  • Accuracy (μm): 10
  • Repeatability (μm): 1
  • Drive Type: Linear Motor
  • Travel (mm): 150

VXY-C-300-BS-D-T-P-B-00 Precision XY Motion Platform


  • Motor: High Torque Brushless Servo
  • Accuracy (μm): 10
  • Repeatability (μm): 0.5
  • Drive Type: Ball Screw
  • Travel (mm): 320