XY Stages

The CXY-BS series stages from Griffin Motion are designed for a variety of applications. This compact, low-profile ball screw stage is built for heavy-duty cycles and long life and can attain the high velocities needed for factory automation and semiconductor processing equipment. The CXY series offers extraordinary levels of orthogonality and parallelism, resulting in high accuracy for combined axis motion. Recirculating ball linear ways and precision-ground ball screws offer extremely smooth operation and velocity control. The XY stage can operate in any orientation and has optional brakes for added safety, as the application requires.

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CXY-C-050-BS-A-M-P-0-00

CXY-C-050-BS-A-H-S-0-00 Precision XY Motion Platform


  • Motor: Brushless Servo
  • Accuracy (μm): 10
  • Repeatability (μm): 2
  • Drive Type: Ball Screw
  • Travel (mm): 50
CXY-C-050-BS-A-M-P-0-00

CXY-C-050-BS-A-M-P-0-00 Precision XY Motion Platform


  • Motor: Brushless Servo
  • Accuracy (μm): 4
  • Repeatability (μm): 0.5
  • Drive Type: Ball Screw
  • Travel (mm): 50
cxy-c-100-bs-a-h-s-0-00_03_jpg

CXY-C-100-BS-A-H-S-0-00 Precision XY Motion Platform


  • Motor: Brushless Servo
  • Accuracy (μm): 15
  • Repeatability (μm): 2
  • Drive Type: Ball Screw
  • Travel (mm): 100
CXY-C-100-BS-A-H-S-D-00

CXY-C-100-BS-A-H-S-D-00 Precision XY Motion Platform


  • Motor: Brushless Servo
  • Accuracy (μm): 15
  • Repeatability (μm): 2
  • Drive Type: Ball Screw
  • Travel (mm): 100
cxy-c-100-bs-a-m-p-0-00_03_jpg

CXY-C-100-BS-A-M-P-0-00 Precision XY Motion Platform


  • Motor: Brushless Servo
  • Accuracy (μm): 4
  • Repeatability (μm): 0.5
  • Drive Type: Ball Screw
  • Travel (mm): 100
cxy-c-100-bs-a-m-s-0-00_03_jpg

CXY-C-100-BS-A-M-S-0-00 Precision XY Motion Platform


  • Motor: Brushless Servo
  • Accuracy (μm): 10
  • Repeatability (μm): 1
  • Drive Type: Ball Screw
  • Travel (mm): 100
cxy-c-100-bs-b-n-s-0-00_00_jpg

CXY-C-100-BS-B-N-S-0-00 Precision XY Motion Platform


  • Motor: Stepper
  • Accuracy (μm): 20
  • Repeatability (μm): 3
  • Drive Type: Ball Screw
  • Travel (mm): 100
cxy-c-100-hs-c-n-s-0-00_00_jpg

CXY-C-100-HS-C-N-S-0-00 Precision XY Motion Platform


  • Motor: Hybrid Stepper lead screw
  • Accuracy (μm): 30
  • Repeatability (μm): 5
  • Drive Type: Hybrid Stepper Leadscrew
  • Travel (mm): 100
cxy-c-150-bs-a-h-s-0-00_02_jpg

CXY-C-150-BS-A-H-S-0-00 Precision XY Motion Platform


  • Motor: Brushless Servo
  • Accuracy (μm): 20
  • Repeatability (μm): 2
  • Drive Type: Ball Screw
  • Travel (mm): 150
cxy-c-150-bs-a-m-p-0-00_08_jpg_1

CXY-C-150-BS-A-M-P-0-00 Precision XY Motion Platform


  • Motor: Brushless Servo
  • Accuracy (μm): 6
  • Repeatability (μm): 0.5
  • Drive Type: Ball Screw
  • Travel (mm): 150
cxy-c-150-bs-a-m-s-0-00_08_jpg

CXY-C-150-BS-A-M-S-0-00 Precision XY Motion Platform


  • Motor: Brushless Servo
  • Accuracy (μm): 10
  • Repeatability (μm): 1
  • Drive Type: Ball Screw
  • Travel (mm): 150
cxy-c-150-bs-b-n-s-0-00_01_jpg

CXY-C-150-BS-B-N-S-0-00 Precision XY Motion Platform


  • Motor: Stepper
  • Accuracy (μm): 25
  • Repeatability (μm): 3
  • Drive Type: Ball Screw
  • Travel (mm): 150
cxy-c-150-hs-c-n-s-0-00_01_jpg

CXY-C-150-HS-C-N-S-0-00 Precision XY Motion Platform


  • Motor: Hybrid Stepper lead screw
  • Accuracy (μm): 40
  • Repeatability (μm): 5
  • Drive Type: Hybrid Stepper Leadscrew
  • Travel (mm): 150
cxy-c-200-bs-a-h-s-0-00

CXY-C-200-BS-A-H-S-0-00 Precision XY Motion Platform


  • Motor: Brushless Servo
  • Accuracy (μm): 25
  • Repeatability (μm): 2
  • Drive Type: Ball Screw
  • Travel (mm): 200
cxy-c-200-bs-a-m-p-0-00

CXY-C-200-BS-A-M-P-0-00 Precision XY Motion Platform


  • Motor: Brushless Servo
  • Accuracy (μm): 8
  • Repeatability (μm): 0.5
  • Drive Type: Ball Screw
  • Travel (mm): 200
cxy-c-200-bs-a-m-s-0-00_00

CXY-C-200-BS-A-M-S-0-00 Precision XY Motion Platform


  • Motor: Brushless Servo
  • Accuracy (μm): 12
  • Repeatability (μm): 1
  • Drive Type: Ball Screw
  • Travel (mm): 200
cxy-c-200-bs-b-n-s-0-00

CXY-C-200-BS-B-N-S-0-00 Precision XY Motion Platform


  • Motor: Stepper
  • Accuracy (μm): 30
  • Repeatability (μm): 3
  • Drive Type: Ball Screw
  • Travel (mm): 200
cxy-c-200-hs-c-n-s-0-00

CXY-C-200-HS-C-N-S-0-00 Precision XY Motion Platform


  • Motor: Hybrid Stepper lead screw
  • Accuracy (μm): 45
  • Repeatability (μm): 5
  • Drive Type: Hybrid Stepper Leadscrew
  • Travel (mm): 200
cxy-c-300-bs-a-h-s-0-00_04_jpg

CXY-C-300-BS-A-H-S-0-00 Precision XY Motion Platform


  • Motor: Brushless Servo
  • Accuracy (μm): 30
  • Repeatability (μm): 2
  • Drive Type: Ball Screw
  • Travel (mm): 300
cxy-c-300-bs-a-m-p-0-00_03_jpg

CXY-C-300-BS-A-M-P-0-00 Precision XY Motion Platform


  • Motor: Brushless Servo
  • Accuracy (μm): 12
  • Repeatability (μm): 1.0
  • Drive Type: Ball Screw
  • Travel (mm): 300
cxy-c-300-bs-a-m-p-0-00_03_jpg_1

CXY-C-300-BS-A-M-S-0-00 Precision XY Motion Platform


  • Motor: Brushless Servo
  • Accuracy (μm): 20
  • Repeatability (μm): 1
  • Drive Type: Ball Screw
  • Travel (mm): 300
cxy-c-300-bs-b-m-s-0-00_02

CXY-C-300-BS-B-M-S-0-00 Precision XY Motion Platform


  • Motor: Stepper Motor
  • Accuracy (μm): 20
  • Repeatability (μm): 1.0
  • Drive Type: Ball Screw
  • Travel (mm): 300
cxy-c-300-bs-b-n-s-0-00_02

CXY-C-300-BS-B-N-S-0-00 Precision XY Motion Platform


  • Motor: Stepper
  • Accuracy (μm): 30
  • Repeatability (μm): 3
  • Drive Type: Ball Screw
  • Travel (mm): 300
cxy-o-150-bs-a-h-s-0-00_02_jpg

CXY-O-150-BS-A-H-S-0-00 Precision XY Motion Platform


  • Motor: Brushless Servo
  • Accuracy (μm): 20
  • Repeatability (μm): 2
  • Drive Type: Ball Screw
  • Travel (mm): 150
cxy-o-150-bs-b-n-s-0-00_00_jpg

CXY-O-150-BS-B-N-S-0-00 Precision XY Motion Platform


  • Motor: Stepper
  • Accuracy (μm): 25
  • Repeatability (μm): 3
  • Drive Type: Ball Screw
  • Travel (mm): 150
cxy-o-150-hs-c-n-s-0-00_00_jpg

CXY-O-150-HS-C-N-S-0-00 Precision XY Motion Platform


  • Motor: Hybrid Stepper lead screw
  • Accuracy (μm): 40
  • Repeatability (μm): 5
  • Drive Type: Hybrid Stepper Leadscrew
  • Travel (mm): 150
cxy-o-300-bs-a-h-s-0-00_04_jpg

CXY-O-300-BS-A-H-S-0-00 Precision XY Motion Platform


  • Motor: Brushless Servo
  • Accuracy (μm): 30
  • Repeatability (μm): 2
  • Drive Type: Ball Screw
  • Travel (mm): 300
cxy-o-300-bs-a-m-p-0-00_02_jpg

CXY-O-300-BS-A-M-P-0-00 Precision XY Motion Platform


  • Motor: Brushless Servo
  • Accuracy (μm): 12
  • Repeatability (μm): 1.0
  • Drive Type: Ball Screw
  • Travel (mm): 300
cxy-o-300-bs-a-m-s-0-00_02_jpg

CXY-O-300-BS-A-M-S-0-00 Precision XY Motion Platform


  • Motor: Brushless Servo
  • Accuracy (μm): 20
  • Repeatability (μm): 1
  • Drive Type: Ball Screw
  • Travel (mm): 300
cxy-o-300-bs-b-n-s-0-00_011

CXY-O-300-BS-B-N-S-0-00 Precision XY Motion Platform


  • Motor: Stepper
  • Accuracy (μm): 35
  • Repeatability (μm): 5
  • Drive Type: Ball Screw
  • Travel (mm): 300
exy-140-060-hs-c-v-s-0-00_00_jpg

EXY-140-060-HS-C-V-S-0-00 XY Motion Platform


  • Motor: Hybrid Stepper lead screw
  • Accuracy (μm): 75
  • Repeatability (μm): 10
  • Drive Type: Hybrid Stepper Leadscrew
  • Travel (mm): 140-060
gxy-c-320-bs-d-h-s-0-00_02_jpg_2_1

GXY-C-320-BF-D-H-S-0-00 Precision XY Motion Platform


  • Motor: High Torque Brushless Servo
  • Accuracy (μm): 30
  • Repeatability (μm): 2
  • Drive Type: Ball Screw
  • Travel (mm): 320
XY Stages, 320mm Travel XY Stage, GXY-C-320-BF-D-M-S-0-00

GXY-C-320-BF-D-M-S-0-00 Precision XY Motion Platform


  • Motor: High Torque Brushless Servo
  • Accuracy (μm): 15
  • Repeatability (μm): 1
  • Drive Type: Ball Screw
  • Travel (mm): 320
XY Stages, 150mm Travel Linear XY Stage, LXY-150-LM-G-M-S-0-00

LXY-150-LM-G-M-S-0-00 Precision XY Motion Platform


  • Motor: Ironless Linear Servo
  • Accuracy (μm): 10
  • Repeatability (μm): 1
  • Drive Type: Linear Motor
  • Travel (mm): 150
vxy-c-300-bs-d-t-p-b-00_00_-_mod_1

VXY-C-300-BS-D-T-P-B-00 Precision XY Motion Platform


  • Motor: High Torque Brushless Servo
  • Accuracy (μm): 10
  • Repeatability (μm): 0.5
  • Drive Type: Ball Screw
  • Travel (mm): 320