XY Stages

The CXY-BS series stages from Griffin Motion are designed for a variety of applications. This compact, low-profile ball screw stage is built for heavy-duty cycles and long life and can attain the high velocities needed for factory automation and semiconductor processing equipment. The CXY series offers extraordinary levels of orthogonality and parallelism, resulting in high accuracy for combined axis motion. Recirculating ball linear ways and precision-ground ball screws offer extremely smooth operation and velocity control. The XY stage can operate in any orientation and has optional brakes for added safety, as the application requires.

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CXY-C-100-BS-A-H-S-0-00


  • Motor: Brushless Servo
  • Accuracy (μm): 15
  • Repeatability (μm): 2
  • Drive Type: Ball Screw
  • Travel (mm): 100

CXY-C-100-BS-A-M-P-0-00


  • Motor: Brushless Servo
  • Accuracy (μm): 04
  • Repeatability (μm): 0.5
  • Drive Type: Ball Screw
  • Travel (mm): 100

CXY-C-100-BS-A-M-S-0-00


  • Motor: Brushless Servo
  • Accuracy (μm): 10
  • Repeatability (μm): 1
  • Drive Type: Ball Screw
  • Travel (mm): 100

CXY-C-100-BS-B-N-S-0-00


  • Motor: Stepper
  • Accuracy (μm): 20
  • Repeatability (μm): 3
  • Drive Type: Ball Screw
  • Travel (mm): 100

CXY-C-100-HS-C-N-S-0-00


  • Motor: Hybrid Stepper lead screw
  • Accuracy (μm): 30
  • Repeatability (μm): 5
  • Drive Type: Hybrid Stepper Leadscrew
  • Travel (mm): 100

CXY-C-150-BS-A-H-S-0-00


  • Motor: Brushless Servo
  • Accuracy (μm): 20
  • Repeatability (μm): 2
  • Drive Type: Ball Screw
  • Travel (mm): 150

CXY-C-150-BS-A-M-P-0-00


  • Motor: Brushless Servo
  • Accuracy (μm): 6
  • Repeatability (μm): 0.5
  • Drive Type: Ball Screw
  • Travel (mm): 150

CXY-C-150-BS-A-M-S-0-00


  • Motor: Brushless Servo
  • Accuracy (μm): 10
  • Repeatability (μm): 1
  • Drive Type: Ball Screw
  • Travel (mm): 150

CXY-C-150-BS-B-N-S-0-00


  • Motor: Stepper
  • Accuracy (μm): 25
  • Repeatability (μm): 3
  • Drive Type: Ball Screw
  • Travel (mm): 150

CXY-C-150-HS-C-N-S-0-00


  • Motor: Hybrid Stepper lead screw
  • Accuracy (μm): 40
  • Repeatability (μm): 5
  • Drive Type: Hybrid Stepper Leadscrew
  • Travel (mm): 150

CXY-C-200-BS-A-H-S-0-00


  • Motor: Brushless Servo
  • Accuracy (μm): 25
  • Repeatability (μm): 2
  • Drive Type: Ball Screw
  • Travel (mm): 200

CXY-C-200-BS-A-M-P-0-00


  • Motor: Brushless Servo
  • Accuracy (μm): 8
  • Repeatability (μm): 0.5
  • Drive Type: Ball Screw
  • Travel (mm): 200

CXY-C-200-BS-A-M-S-0-00


  • Motor: Brushless Servo
  • Accuracy (μm): 12
  • Repeatability (μm): 1
  • Drive Type: Ball Screw
  • Travel (mm): 200

CXY-C-200-BS-B-N-S-0-00


  • Motor: Stepper
  • Accuracy (μm): 30
  • Repeatability (μm): 3
  • Drive Type: Ball Screw
  • Travel (mm): 200

CXY-C-200-HS-C-N-S-0-00


  • Motor: Hybrid Stepper lead screw
  • Accuracy (μm): 45
  • Repeatability (μm): 5
  • Drive Type: Hybrid Stepper Leadscrew
  • Travel (mm): 200

CXY-C-300-BS-A-H-S-0-00


  • Motor: Brushless Servo
  • Accuracy (μm): 30
  • Repeatability (μm): 2
  • Drive Type: Ball Screw
  • Travel (mm): 300

CXY-C-300-BS-A-M-P-0-00


  • Motor: Brushless Servo
  • Accuracy (μm): 12
  • Repeatability (μm): 1.0
  • Drive Type: Ball Screw
  • Travel (mm): 300

CXY-C-300-BS-A-M-S-0-00


  • Motor: Brushless Servo
  • Accuracy (μm): 20
  • Repeatability (μm): 1
  • Drive Type: Ball Screw
  • Travel (mm): 300

CXY-C-300-BS-B-M-S-0-00


  • Motor: Stepper Motor
  • Accuracy (μm): 20
  • Repeatability (μm): 1.0
  • Drive Type: Ball Screw
  • Travel (mm): 300

CXY-C-300-BS-B-N-S-0-00


  • Motor: Stepper
  • Accuracy (μm): 30
  • Repeatability (μm): 3
  • Drive Type: Ball Screw
  • Travel (mm): 300

CXY-O-150-BS-A-H-S-0-00


  • Motor: Brushless Servo
  • Accuracy (μm): 20
  • Repeatability (μm): 2
  • Drive Type: Ball Screw
  • Travel (mm): 150

CXY-O-150-BS-B-N-S-0-00


  • Motor: Stepper
  • Accuracy (μm): 25
  • Repeatability (μm): 3
  • Drive Type: Ball Screw
  • Travel (mm): 150

CXY-O-150-HS-C-N-S-0-00


  • Motor: Hybrid Stepper lead screw
  • Accuracy (μm): 40
  • Repeatability (μm): 5
  • Drive Type: Hybrid Stepper Leadscrew
  • Travel (mm): 150

CXY-O-300-BS-A-H-S-0-00


  • Motor: Brushless Servo
  • Accuracy (μm): 30
  • Repeatability (μm): 2
  • Drive Type: Ball Screw
  • Travel (mm): 300

CXY-O-300-BS-A-M-P-0-00


  • Motor: Brushless Servo
  • Accuracy (μm): 12
  • Repeatability (μm): 1.0
  • Drive Type: Ball Screw
  • Travel (mm): 300

CXY-O-300-BS-A-M-S-0-00


  • Motor: Brushless Servo
  • Accuracy (μm): 20
  • Repeatability (μm): 1
  • Drive Type: Ball Screw
  • Travel (mm): 300

CXY-O-300-BS-B-N-S-0-00


  • Motor: Stepper
  • Accuracy (μm): 35
  • Repeatability (μm): 5
  • Drive Type: Ball Screw
  • Travel (mm): 300

EXY-140-060-HS-C-V-S-0-00


  • Motor: Hybrid Stepper lead screw
  • Accuracy (μm): 75
  • Repeatability (μm): 10
  • Drive Type: Hybrid Stepper Leadscrew
  • Travel (mm): 140-060

GXY-C-320-BF-D-H-S-0-00


  • Motor: High Torque Brushless Servo
  • Accuracy (μm): 30
  • Repeatability (μm): 2
  • Drive Type: Ball Screw
  • Travel (mm): 320

GXY-C-320-BF-D-M-S-0-00


  • Motor: High Torque Brushless Servo
  • Accuracy (μm): 15
  • Repeatability (μm): 1
  • Drive Type: Ball Screw
  • Travel (mm): 320

VXY-C-300-BS-D-T-P-B-00


  • Motor: High Torque Brushless Servo
  • Accuracy (μm): 10
  • Repeatability (μm): 0.5
  • Drive Type: Ball Screw
  • Travel (mm): 320