XY Stages

The CXY-BS series stages from Griffin Motion are designed for a variety of applications. This compact, low-profile ball screw stage is built for heavy-duty cycles and long life and can attain the high velocities needed for factory automation and semiconductor processing equipment. The CXY series offers extraordinary levels of orthogonality and parallelism, resulting in high accuracy for combined axis motion. Recirculating ball linear ways and precision-ground ball screws offer extremely smooth operation and velocity control. The XY stage can operate in any orientation and has optional brakes for added safety, as the application requires.

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CXY-C-100-BS-A-H-S-0-00


Travel (mm): 100
Accuracy (μm): 15
Repeatability (μm): 2
Motor: Brushless Servo
Drive Type: Ball Screw

CXY-C-100-BS-A-M-P-0-00


Travel (mm): 100
Accuracy (μm): 04
Repeatability (μm): 0.5
Motor: Brushless Servo
Drive Type: Ball Screw

CXY-C-100-BS-A-M-S-0-00


Travel (mm): 100
Accuracy (μm): 10
Repeatability (μm): 1
Motor: Brushless Servo
Drive Type: Ball Screw

CXY-C-100-BS-B-N-S-0-00


Travel (mm): 100
Accuracy (μm): 20
Repeatability (μm): 3
Motor: Stepper
Drive Type: Ball Screw

CXY-C-100-HS-C-N-S-0-00


Travel (mm): 100
Accuracy (μm): 30
Repeatability (μm): 5
Motor: Hybrid Stepper lead screw
Drive Type: Hybrid Stepper Leadscrew

CXY-C-150-BS-A-H-S-0-00


Travel (mm): 150
Accuracy (μm): 20
Repeatability (μm): 2
Motor: Brushless Servo
Drive Type: Ball Screw

CXY-C-150-BS-A-M-P-0-00


Travel (mm): 150
Accuracy (μm): 6
Repeatability (μm): 0.5
Motor: Brushless Servo
Drive Type: Ball Screw

CXY-C-150-BS-A-M-S-0-00


Travel (mm): 150
Accuracy (μm): 10
Repeatability (μm): 1
Motor: Brushless Servo
Drive Type: Ball Screw

CXY-C-150-BS-B-N-S-0-00


Travel (mm): 150
Accuracy (μm): 25
Repeatability (μm): 3
Motor: Stepper
Drive Type: Ball Screw

CXY-C-150-HS-C-N-S-0-00


Travel (mm): 150
Accuracy (μm): 40
Repeatability (μm): 5
Motor: Hybrid Stepper lead screw
Drive Type: Hybrid Stepper Leadscrew

CXY-C-200-BS-A-H-S-0-00


Travel (mm): 200
Accuracy (μm): 25
Repeatability (μm): 2
Motor: Brushless Servo
Drive Type: Ball Screw

CXY-C-200-BS-A-M-P-0-00


Travel (mm): 200
Accuracy (μm): 8
Repeatability (μm): 0.5
Motor: Brushless Servo
Drive Type: Ball Screw

CXY-C-200-BS-A-M-S-0-00


Travel (mm): 200
Accuracy (μm): 12
Repeatability (μm): 1
Motor: Brushless Servo
Drive Type: Ball Screw

CXY-C-200-BS-B-N-S-0-00


Travel (mm): 200
Accuracy (μm): 30
Repeatability (μm): 3
Motor: Stepper
Drive Type: Ball Screw

CXY-C-200-HS-C-N-S-0-00


Travel (mm): 200
Accuracy (μm): 45
Repeatability (μm): 5
Motor: Hybrid Stepper lead screw
Drive Type: Hybrid Stepper Leadscrew

CXY-C-300-BS-A-H-S-0-00


Travel (mm): 300
Accuracy (μm): 30
Repeatability (μm): 2
Motor: Brushless Servo
Drive Type: Ball Screw

CXY-C-300-BS-A-M-P-0-00


Travel (mm): 300
Accuracy (μm): 12
Repeatability (μm): 1.0
Motor: Brushless Servo
Drive Type: Ball Screw

CXY-C-300-BS-A-M-S-0-00


Travel (mm): 300
Accuracy (μm): 20
Repeatability (μm): 1
Motor: Brushless Servo
Drive Type: Ball Screw

CXY-C-300-BS-B-M-S-0-00


Travel (mm): 300
Accuracy (μm): 20
Repeatability (μm): 1.0
Motor: Stepper Motor
Drive Type: Ball Screw

CXY-C-300-BS-B-N-S-0-00


Travel (mm): 300
Accuracy (μm): 30
Repeatability (μm): 3
Motor: Stepper
Drive Type: Ball Screw

CXY-O-150-BS-A-H-S-0-00


Travel (mm): 150
Accuracy (μm): 20
Repeatability (μm): 2
Motor: Brushless Servo
Drive Type: Ball Screw

CXY-O-150-BS-B-N-S-0-00


Travel (mm): 150
Accuracy (μm): 25
Repeatability (μm): 3
Motor: Stepper
Drive Type: Ball Screw

CXY-O-150-HS-C-N-S-0-00


Travel (mm): 150
Accuracy (μm): 40
Repeatability (μm): 5
Motor: Hybrid Stepper lead screw
Drive Type: Hybrid Stepper Leadscrew

CXY-O-300-BS-A-H-S-0-00


Travel (mm): 300
Accuracy (μm): 30
Repeatability (μm): 2
Motor: Brushless Servo
Drive Type: Ball Screw

CXY-O-300-BS-A-M-P-0-00


Travel (mm): 300
Accuracy (μm): 12
Repeatability (μm): 1.0
Motor: Brushless Servo
Drive Type: Ball Screw

CXY-O-300-BS-A-M-S-0-00


Travel (mm): 300
Accuracy (μm): 20
Repeatability (μm): 1
Motor: Brushless Servo
Drive Type: Ball Screw

CXY-O-300-BS-B-N-S-0-00


Travel (mm): 300
Accuracy (μm): 35
Repeatability (μm): 5
Motor: Stepper
Drive Type: Ball Screw

EXY-140-060-HS-C-V-S-0-00


Travel (mm): 140-060
Accuracy (μm): 75
Repeatability (μm): 10
Motor: Hybrid Stepper lead screw
Drive Type: Hybrid Stepper Leadscrew

GXY-C-320-BF-D-H-S-0-00


Travel (mm): 320
Accuracy (μm): 30
Repeatability (μm): 2
Motor: High Torque Brushless Servo
Drive Type: Ball Screw

GXY-C-320-BF-D-M-S-0-00


Travel (mm): 320
Accuracy (μm): 15
Repeatability (μm): 1
Motor: High Torque Brushless Servo
Drive Type: Ball Screw

VXY-C-300-BS-D-T-P-B-00


Travel (mm): 320
Accuracy (μm): 10
Repeatability (μm): 0.5
Motor: High Torque Brushless Servo
Drive Type: Ball Screw