- 500mm x 400mm XY Travel
- Built for Cleanroom Compatibility
- Excellent Field Serviceability and Long Service Life
- Ironless Linear Motors
- High-Resolution Encoders
- Optional Cable Management for 3rd Axis of Motion and Customer Accessories
- Optional Vacuum/Air Lines
The Griffin Motion XYS is a high-performance XY planar motion stage engineered specifically for the semiconductor industry. It features ironless linear motors that deliver high acceleration, high speeds, and exceptional, cog free positioning performance. The wide rail spacing on the lower (X) axis enhances rigidity and ensures excellent flatness. Designed for long production life, the XYS offers excellent field serviceability, allowing for quick maintenance and minimal downtime. Contact Griffin Motion for pricing, availability and customizations.
| Product Family | XYS |
| Encoder Type | Low CTE Linear Scale |
| Travel (mm) | 500 x 400 |
| Drive Type | Direct Drive |
| Motor | Ironless Linear Motor |
| Accuracy (μm) | 10.0 (2.0 Compensated) |
| Encoder Output | Incremental, A quad B or 1Vpp, Index |
| Force X (N) | 296 (Cont.), 1018 (Peak) |
| Force Y (N) | 198 (Cont.), 679 (Peak) |
| Flatness (μm) | 8/300mm |
| Limit Switches | Yes |
| Repeatability (μm) | 1.0 |
| Moving Mass X (kg) | 37 |
| Moving Mass Y (kg) | 6 |
| Orthogonality (arc-sec) | 12.0 |
| Stage Mass (kg) | 87 |
