Linear Stages
NPS-110
Linear Motor Driven Crossed-Roller Stage, 110mm Travel
- Product SKU:
- NPS-110
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Overview
The NPS Series stages are designed for a variety of applications. This compact low profile
linear motor stage is built for high duty cycles and long life and attains high velocities for factory
automation and semiconductor processing equipment. This stage has exceptional levels of
accuracy, repeatability, flatness and straightness. The linear motor and crossed roller bearings
provide smooth motion. The NPS Series stages can be stacked to create XY motion.
Features
Compact Low-Profile Design
110mm Travel
Linear Motor
Optical limit switches with home
High resolution linear encoder
Crossed Roller Bearings
Specifications
| Accuracy (µm): | 4 |
|---|---|
| Drive Type: | Linear Motor |
| Encoder Type: | 20µm Linear SS, Sinusoidal |
| Flatness (µm): | 6 |
| Force X: | 19.5 |
| Force Y: | 100 |
| Force Z: | 100 |
| Height (mm): | 45 |
| Length (mm): | 248 |
| Limit Switches: | Yes |
| Moment X: | 1.8 |
| Moment Y: | 1.8 |
| Moment Z: | 1.8 |
| Moving Mass X: | 1.35 |
| Pitch (arc-sec): | 12 |
| Stage Mass (kg): | 3.13 |
| Width: | 130 |
| Yaw: | 12 |
Mechanical Details
Downloads
