XY Stages
LXY-150
150mm Travel Linear Motor XY Stage
- Product SKU:
- LXY-150
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Overview
The LXY is a 150 mm XY stage engineered for high-precision planar motion. Each axis is driven by an ironless linear motor, delivering exceptionally smooth, zero-cogging motion with high acceleration and bandwidth. High-stiffness crossed roller bearings guide the motion with incredible smoothness and rigidity. The direct-drive design eliminates backlash, while integrated linear encoders provide excellent accuracy, resolution, and repeatability. The result is a low-profile, high-performance stage ideal for demanding applications in metrology, photonics, semiconductor inspection, and precision automation.
Features
150mm XY Travel
Ironless Linear Motors
Optical Limit Switches and Home Index
Variety of Encoder Options
Low Profile Design
Crossed Roller Bearings
Integrated Cable Management
Specifications
| Accuracy (±µm): | Up to 2.0 (with Calibration) |
|---|---|
| Drive Type: | Linear Motor |
| Encoder Resolution (µm): | Up to 0.1 |
| Flatness (µm): | 15 |
| Force Z: | 100 |
| Moving Mass X: | 9.3 |
| Moving Mass Y: | 4.8 |
| Pitch (arc-sec): | 15 |
| Stage Mass (kg): | 15 |
| Travel (mm): | 150 |
| Yaw: | 7 |
Mechanical Details
Downloads
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