Semiconductor Processing

GXY-C-320-BF-D-M-S-0-00

Precision XY Motion Platform

Product SKU:: GXY-C-320-BF-D-M-S-0-00

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Overview

The GXY series stages are designed for a variety of applications. This ball screw stage is built for high duty cycles and long life and can attain high velocities for factory automation and semiconductor processing equipment. The GXY series offers extraordinary levels of orthogonality and parallelism resulting in high accuracy for combined axis motion. Crossed roller bearings and precision ground ball screws offer extremely smooth operation and velocity control. The XY stage can operate in any orientation and has optional brakes for added safety.

Features

320mm XY Travel

Zero backlash, precision ground 5mm lead ball screws

High resolution linear encoder

Brushless high torque servo motor drive

Crossed Roller Bearings

Specifications

Accuracy (µm):	15
Additional Options:	No Additional Options
Drive Type:	Ball Screw
Encoder Output:	A quad B, index
Encoder Resolution (µm):	0.1
Encoder Type:	0.1um Linear SS Scale
Flatness (µm):	10
Force X:	200
Force Y:	200
Force Z:	800
Height (mm):	99
Length (mm):	590
Limit Switches:	Yes
Moment X:	300
Moment Y:	300
Moment Z:	100
Moving Mass X:	38.7
Moving Mass Y:	14.5
Pitch (arc-sec):	15
Stage Mass (kg):	58.5
Precision Class:	Standard Precision
Straightness (µm):	10
Width:	518
Yaw:	10