Griffin Motion, LLC.

LXY-150-LM-G-M-S-0-00

Precision XY Stage with Ironless Linear Servo Drive, Crossed Roller Ways, and Linear Encoder

The LXY series stages are designed for a variety of applications. This compact low profile
two-axis stage is built for high duty cycles and long life and attains high velocities for factory
automation and semiconductor processing equipment. The linear motors offer extremely smooth
operation and velocity control. The LXY series offers extraordinary levels of orthogonality and
parallelism resulting in high accuracy for combined axis motion.

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