- High speed
- 150mm Travel
- Linear Motor
- Optical limit switches with home
- High resolution linear encoder
- Recirculating ball linear ways
- Side seals
- Extended life trackless cable
The LM3 Series stages are designed for a variety of applications. This compact low profile linear motor stage is built for high duty cycles and long life and attains high velocities for factory automation and semiconductor processing equipment. This stage has exceptional levels of accuracy, repeatability, flatness and straightness. Recirculating ball linear ways and the linear motor offer extremely smooth operation and velocity control. The trackless cable minimizes vibrations and increases service life. Side seals and a hard cover make it an excellent choice for dirty environments. The LM3 Series stages can be stacked to create XY motion.
| Product Family | LM3 |
| Encoder Type | 40µm Linear SS Scale |
| Additional Options | Side Seals |
| Travel (mm) | 150 |
| Drive Type | Linear Motor |
| Motor | Ironless Linear Servo |
| Precision Class | Standard Precision |
| Accuracy (μm) | 8* |
| Encoder Output | 1Vp-p |
| Force X Peak (N) | 170 |
| Force X Continuous (N) | 50 |
| Force Y (N) | 200 |
| Force Z (N) | 440 |
| Flatness (μm) | 4 |
| Height (mm) | 62 |
| Length (mm) | 380 |
| Limit Switches | Yes |
| Encoder Resolution (μm) | 40μm per period |
| Repeatability (μm) | 1* |
| Linear Velocity (mm/s) | 2000 |
| Moment X (N·m) | 50 |
| Moment Y (N·m) | 50 |
| Moment Z (N·m) | 25 |
| Moving Mass X (kg) | 2.02 |
| Pitch (arc-sec) | 5 |
| Stage Mass (kg) | 6.78 |
| Straightness (μm) | 4 |
| Width (mm) | 258 |
| Yaw (arc-sec) | 5 |
| * | Subject to control configuration |
