- 320mm XY Travel
- Zero backlash, precision ground 5mm lead ball screws
- High resolution linear encoder
- Brushless high torque servo motor drive
- Crossed Roller Bearings
The GXY series stages are designed for a variety of applications. This ball screw stage is built for high duty cycles and long life and can attain high velocities for factory automation and semiconductor processing equipment. The GXY series offers extraordinary levels of orthogonality and parallelism resulting in high accuracy for combined axis motion. Crossed roller bearings and precision ground ball screws offer extremely smooth operation and velocity control. The XY stage can operate in any orientation and has optional brakes for added safety.
| Product Family | GXY |
| Encoder Type | 0.1µm Linear SS Scale |
| Precision | Standard Precision |
| Additional Options | No Additional Options |
| Travel (mm) | 320 |
| Frame Style | No Aperture |
| Drive Type | Ball Screw |
| Motor | High Torque Brushless Servo |
| Precision Class | Standard Precision |
| Accuracy (μm) | 15 |
| Encoder Output | A quad B, index |
| Force X (N) | 200 |
| Force Y (N) | 200 |
| Force Z (N) | 800 |
| Flatness (μm) | 10 |
| Height (mm) | 99 |
| Length (mm) | 590 |
| Limit Switches | Yes |
| Encoder Resolution (μm) | 0.1 |
| Repeatability (μm) | 1 |
| Linear Velocity (mm/s) | 200 |
| Moment X (N·m) | 300 |
| Moment Y (N·m) | 300 |
| Moment Z (N·m) | 100 |
| Moving Mass X (kg) | 38.7 |
| Moving Mass Y (kg) | 14.5 |
| Encoder Type | 0.1um Linear SS Scale |
| Orthogonality (arc-sec) | 10 |
| Pitch (arc-sec) | 15 |
| Stage Mass (kg) | 58.5 |
| Straightness (μm) | 10 |
| Width (mm) | 518 |
| Yaw (arc-sec) | 10 |
