- Compact Low-Profile Design
- 150mm XY Travel
- Zero backlash, precision ground ball screws
- Optical limit switches with home
- High resolution rotary encoder
- Brushless servo motor drive
- Recirculating ball linear ways
- Open Aperture
The CXY-BS series stages are designed for a variety of applications. This compact low profile ball screw stage is built for high duty cycles and long life and can attain high velocities for factory automation and semiconductor processing equipment. The CXY series offers extraordinary levels of orthogonality and parallelism resulting in high accuracy for combined axis motion. The open aperture allows for part access from both the top and bottom of the stage. Recirculating ball linear ways and precision ground ball screws offer extremely smooth operation and velocity control. The XY stage can operate in any orientation and has optional brakes for added safety.
| Product Family | CXY |
| Encoder Type | 0.125µm Rotary |
| Precision | Standard Precision |
| Additional Options | No Additional Options |
| Travel (mm) | 150 |
| Frame Style | Open Aperture |
| Drive Type | Ball Screw |
| Motor | Brushless Servo |
| Precision Class | Standard Precision |
| Accuracy (μm) | 20 |
| Encoder Output | A quad B, index |
| Force X (N) | 200 |
| Force Y (N) | 200 |
| Force Z (N) | 250 |
| Flatness (μm) | 7 |
| Height (mm) | 66 |
| Length (mm) | 309 |
| Limit Switches | Yes |
| Encoder Resolution (μm) | 0.125 |
| Repeatability (μm) | 2 |
| Linear Velocity (mm/s) | 150 |
| Moment X (N·m) | 110 |
| Moment Y (N·m) | 110 |
| Moment Z (N·m) | 75 |
| Moving Mass X (kg) | 7.01 |
| Moving Mass Y (kg) | 2.49 |
| Encoder Type | 0.125um Rotary |
| Orthogonality (arc-sec) | 10 |
| Pitch (arc-sec) | 15 |
| Stage Mass (kg) | 9.98 |
| Straightness (μm) | 7 |
| Width (mm) | 366 |
| Yaw (arc-sec) | 10 |
