- Compact Low-Profile Design
- 200mm XY Travel
- Zero backlash, precision ground ball screws
- Optical limit switches with home
- High resolution linear encoder
- Brushless servo motor drive
- Crossed Roller Bearings
The CXY-BS series stages are designed for a variety of applications. This compact low profile ball screw stage is built for high duty cycles and long life and can attain high velocities for factory automation and semiconductor processing equipment. The CXY series offers extraordinary levels of orthogonality and parallelism resulting in high accuracy for combined axis motion. Crossed roller linear guide ways and precision ground ball screws offer extremely smooth operation and velocity control. The XY stage can operate in any orientation and has optional brakes for added safety.
| Product Family | CXY |
| Encoder Type | 0.1µm Linear SS Scale |
| Precision | HIgh Precision |
| Additional Options | No Additional Options |
| Travel (mm) | 200 |
| Frame Style | No Aperture |
| Drive Type | Ball Screw |
| Motor | Brushless Servo |
| Precision Class | High Precision |
| Accuracy (μm) | 8 |
| Encoder Output | A quad B, index |
| Force X (N) | 165 continuous, 330 peak |
| Force Y (N) | 165 continuous, 330 peak |
| Force Z (N) | 400 |
| Flatness (μm) | 5 |
| Height (mm) | 66 |
| Length (mm) | 397 |
| Limit Switches | Yes |
| Encoder Resolution (μm) | 0.1 |
| Repeatability (μm) | 0.5 |
| Linear Velocity (mm/s) | 140 |
| Moment X (N·m) | 110 |
| Moment Y (N·m) | 110 |
| Moment Z (N·m) | 75 |
| Moving Mass X (kg) | 11.46 |
| Moving Mass Y (kg) | 4.75 |
| Encoder Type | 0.1um Linear SS Scale |
| Orthogonality (arc-sec) | 6 |
| Pitch (arc-sec) | 10 |
| Stage Mass (kg) | 17.7 |
| Straightness (μm) | 5 |
| Width (mm) | 360 |
| Yaw (arc-sec) | 4 |
