CXY-C-200-BS-A-M-P-0-00 Precision XY Motion Platform

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  • Compact Low-Profile Design
  • 200mm XY Travel
  • Zero backlash, precision ground ball screws
  • Optical limit switches with home
  • High resolution linear encoder
  • Brushless servo motor drive
  • Crossed Roller Bearings

The CXY-BS series stages are designed for a variety of applications. This compact low profile ball screw stage is built for high duty cycles and long life and can attain high velocities for factory automation and semiconductor processing equipment. The CXY series offers extraordinary levels of orthogonality and parallelism resulting in high accuracy for combined axis motion. Recirculating ball linear ways and precision ground ball screws offer extremely smooth operation and velocity control. The XY stage can operate in any orientation and has optional brakes for added safety.

Product FamilyCXY
Encoder Type0.1µm Linear SS Scale
PrecisionHIgh Precision
Additional OptionsNo Additional Options
Travel (mm)200
Frame StyleNo Aperture
Drive TypeBall Screw
MotorBrushless Servo
Precision ClassHigh Precision
Accuracy (μm)8
Encoder OutputA quad B, index
Force X (N)200
Force Y (N)200
Force Z (N)250
Flatness (μm)5
Height (mm)66
Length (mm)396.6
Limit SwitchesYes
Encoder Resolution (μm)0.1
Repeatability (μm)0.5
Linear Velocity (mm/s)150
Moment X (N·m)110
Moment Y (N·m)110
Moment Z (N·m)75
Moving Mass X (kg)11.46
Moving Mass Y (kg)4.75
Encoder Type0.1um Linear SS Scale
Orthogonality (arc-sec)6
Pitch (arc-sec)10
Stage Mass (kg)17.7
Straightness (μm)5
Width (mm)359.4
Yaw (arc-sec)4

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