RTS-DD Series Precision Rotary Table
RTS-DD
RTS-DD 100mm Vacuum
RTS-DD 200mm
Features
- Ultra-compact tall package
- Resolution to .36 arc-sec
- Direct Drive
- Compatible with most three phase brushless motor drives
- Available in 100mm, and 200mm
- Through hole for beam paths and vacuum lines
- Vacuum preparation available
The Griffin Motion RTS-DD Series Rotary tables are compact, direct drive, precision positioning tables designed for the increasing demands of the semiconductor industry. The brushless direct drive technology eliminates backlash and improves reliability by eliminating sliding friction throughout the stage. The compact stage profile helps to minimize abbe error when used in conjunction with other motion axis. The bore allows convenient routing of vacuum or high voltage lines for a range of wafer chucks. Positioning resolution can be selected to meet the needs of the final application. Resolutions up to 0.36 arc sec are available for fine wafer alignment applications. Lower resolutions are available for high speed. Low out-gassing components, low vapor pressure lubricants and other preparations are available for vacuum applications down to 10-6 Torr. This stage has a 3 phase brushless motor with three hall-effect sensors for motor phasing and commutation. This allows it to interface with a large range of standard motion controllers including the Griffin Motion MCA series of controllers.
100mm - Download Product Information PDF
200mm - Download Product Information PDF