Open Aperture Recirculating Beating Ball Screw Actuated XY Table
CXY-BS
Features
- Compact
- Travel range from 150mm to 300mm
- 15µm accuracy
- Optional error mapping for increased accuracy
- Linear encoder to .025µm accuracy
The CXY-BS-O-300 Series recirculating ball bearing stage is designed to meet the head-on demands of factory automation and semiconductor processing applications. These compact ball-screw-driven stages combine high speed and high accuracy in a cost-effective package for a variety of applications.
The CXY-DS Series states deliver high accuracy combined X-Y axis motion as a result of their extraordinary levels of orthogonality and parallelism not typically found in screw-driven mechanical bearing stages.
The standard open loop configuration achieves sub-micron repeatability and accuracy better than 20µm in a 300mm travel stage. With the addition of optional linear encoders, repeatability of .3µm and accuracy of 10µm is guaranteed. A repeatable reference index for homing and integrated limit switches for independent right and left end travel limits are included with the linear encoder option.