HDS-BS 150 Series
HDS-BS 200 Series
HDS-BS 300 Series
HDS-BS 450 Series
HDS Series
Features
- Velocities up to 400mm/sec
- Up to 4µm accuracy
- Servo or stepper motor drive
- Linear encoder to .025µm resolution
- Stackable design for XY configuration
- Optional brake for vertical operation
The HDS-BS Series recirculating ball bearing stages are designed to meet head-on the demands of factory automation and semiconductor processing applications. These heavy-duty ball screw driven stages combine high speed and high accuracy in a cost-effective package for a variety of applications. They are designed for heavy loads and can be configured for harsh environments. The HDS-BS Series stages can be stacked to create X, Y, and Z motion. These stages are also available in vacuum compatible configuration. The stage achieves sub-micron repeatability and accuracy up to 4µm in a travel stage. A repeatable reference index for homing and integrated limit switches for independent right and left end of travel limits are included with the linear encoder option.
150mm - Download Product Information PDF
200mm - Download Product Information PDF
300mm - Download Product Information PDF
450mm - Download Product Information PDF