FS-BS-50 Series Precision Motion Platform
FS-BS 50 Series
Optic View
Angled View
Features
- Velocities up to 75mm/sec
- 2µm accuracy
- Optional error mapping for increased accuracy
- Servo or stepper motor drive
- Linear encoder .01µm to 1.0µm resolution
- Optic plate can have custom threads for any optic
- Optional vacuum preparation to 10-7 Torr
The FS-BS Series stages are designed specifically for high-speed focusing applications for semiconductor, imaging, and biomedical equipment manufacturers. Combine high speed and high accuracy in a cost-effective and compact package with these reliable ball screw driven stages. The moving saddle with integrated optics mount has been developed specifically for low mass and high stiffness. Standard mounting thread is 26mm x 36 TPI. Custom objective mounts are an available option. Saddle can be customized for other payloads such as beam steering galvanometers and distance sensing devices for auto-focus applications.
Download Product Information PDF