MLS-BS Series Precision Motion Platform

Features

  • Velocities up to 100mm/sec
  • 2μm accuracy
  • Optional error mapping for increased accuracy
  • Travel available in  50mm
  • Servo or stepper motor drive
  • Linear encoder to .025μm resolution
  • Crossed roller bearings
  • Stackable design for XY configuration

The MLS-BS Series compact crossed roller bearing stages are designed to meet the increasing demands of semiconductor, imaging, and biomedical equipment manufacturers.  These reliable ball screw driven stages combine high speed and high accuracy in a cost effective and compact package for a variety of applications. The MLS-BS Series stages can be oriented vertically or stacked to create XY motion.  The optional tooling plate is easily customized for different mounting options.

The lowest cost configuration which utilizes open loop, stepper motor drive achieves sub micron repeatability and accuracy better than 10μm in a 50mm travel stage.  With the addition of an optional linear encoder, repeatability of 0.3μm and accuracy of 2μm is guaranteed.  Servo motor configuration allows for increased speed and load capabilities.  A repeatable reference index for homing and integrated limit switches, for independent right and left end of travel limits, are included with the linear encoder option.

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