LNS-BS Series Precision Motion Platform

Features

Velocities up to 150mm/sec
3μm accuracy
Optional error mapping for increased accuracy
Travel available from 50mm to 150mm
Servo or stepper motor drive
Linear encoder to .025μm resolution
Crossed roller bearings
Stackable design for XY configuration
Optional brake for vertical operation

The LNS-BS Series crossed roller bearing stages are designed to meet ‘head-on’ the demands of factory automation and semiconductor processing applications. These compact ball screw driven stages combine high speed and high accuracy in a cost effective package for a variety of applications.

The LNS-BS Series stages can be stacked to create X, Y and Z motion. These stages are also available in a vacuum compatible configuration.

The open loop configuration achieves sub micron repeatability and accuracy better than 8μm in a 100mm travel stage. With the addition of an optional linear encoder, repeatability of 0.3μm and accuracy of 3μm is guaranteed. A repeatable reference index for homing and integrated limit switches, for independent right and left end of travel limits, are included with the linear encoder option.

50 Series - Download Product Information PDF
100 Series - Download Product Information PDF
150 Series - Download Product Information PDF

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